The first prototypes of a laser for lithography were produced in Moscow.

Lassard Group of Companies has developed an excimer laser, which will become a key element of lithography equipment for the production of chips with design standards up to 65 nm. Deliveries of 130 nm lithographers are scheduled for 2026, and in the future - for 90 nm as well.

The main customer is Mikron, which is interested in scaling up production. At the moment there are only two companies in the world producing such equipment, and Russia may become the third country where production of lasers for lithographs is established.

Excimer lasers are needed to create ultra-precise microchips. They can be used to draw complex microscopic details on silicon wafers, which are then turned into processors and other important elements of electronics.

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